Apparatus and method for producing color filters by discharging material

ABSTRACT

The present invention provides a system which shortens the scanning time with an ink jet head for forming a pattern of filter elements of a color filter, picture element pixels of an electroluminescence (EL) device, or the like. An apparatus for producing a color filter can include a plurality of filter elements arranged on a substrate. The apparatus can further include a plurality of heads each having a nozzle row having a plurality of nozzles arranged, an ink supply device for supplying a filter element material to the heads, a carriage supporting the heads arranged thereon, a main scanning driving device for moving the carriage by main scanning in the X direction, and a sub-scanning driving device for moving the carriage by sub-scanning in the Y direction. The carriage supports the plurality of heads each of which is inclined at an in-plane inclination angle θ.

BACKGROUND OF THE INVENTION

[0001] 1. Field of Invention

[0002] The present invention relates to an apparatus and method fordischarging a material onto an object. Particularly, the presentinvention relates to an apparatus and method for producing a colorfilter used for optical devices such as a liquid crystal device, and thelike. The present invention also relates to an apparatus and method formanufacturing a liquid crystal device having a color filter. The presentinvention further relates to an apparatus and method for manufacturingan electroluminescence (EL) device for displaying by using an ELluminescent layer. The present invention further relates to anelectronic apparatus manufactured by any one of the above-describedmethods.

[0003] 2. Description of Related Art

[0004] Recently, display devices, such as a liquid crystal device, anelectroluminescence device (EL device), and the like have been widelyused as display sections of electronic apparatuses, such as a cellphone, a portable computer, etc. Additionally, in recent years, afull-color display made by display devices has been increasingly used. Afull-color display of a liquid crystal device can be made by, forexample, transmitting light, which is modulated by a liquid crystallayer, through a color filter. The color filter can include dot-shapedcolor filter elements of R (red), G (green) and B (blue) which areformed in a predetermined arrangement such as a stripe, delta, or mosaicarrangement on the surface of a substrate of glass, plastic, or thelike.

[0005] In a full-color display of an EL device, dot-shaped ELluminescent layers of R (red), G (green) and B (blue) colors areprovided in a predetermined arrangement on electrodes, which are formedin any desired arrangement, on the surface of a substrate made of, forexample, glass, plastic, or the like. The voltage applied to theseelectrodes is controlled for each pixel to emit light of a desired colorfrom each pixel, thereby performing a full-color display.

[0006] It is conventionally known that a photolithography process can beused for patterning the filter elements of each of the R, G, and Bcolors of the color filter, or patterning the pixels of each of the R,G, and B colors of the EL device. However, the use of thephotolithography process has the problem of complicating the process,and increasing the cost due to the high consumption of each colormaterial and photoresist, etc.

[0007] In order to solve the problem, a method has been proposed, inwhich a filter material, an EL luminescent material, or the like isdischarged in a dot shape to form a dot-arrangement filament or ELluminescent layer, or the like.

[0008] Consideration will now be given to a case in which as shown inFIG. 22(b), a plurality of dot-shaped filter elements 303 are formed byan ink jet method in each of a plurality of panel areas 302, which areset on the surface of a large-area substrate of glass, plastic, or thelike, i.e., a so-called mother board 301 shown in FIG. 22(a). In thiscase, during several times (twice in the case shown in FIG. 22(b)) ofmain scanning with an ink jet head 306 having a nozzle row 305 includinga plurality of nozzles 304 arranged in a row as shown in FIG. 22(c) foreach panel area 302, as shown by arrows A1 and A2 in FIG. 22(b), an ink,i.e., a filter material, is discharged from the plurality of nozzles toform the filter elements 303 at desired positions.

[0009] The filter elements 303 of each of the R, G, and B colors areformed in an appropriate arrangement, such as a stripe, delta or mosaicarrangement. Therefore, for ink discharge from the ink jet head 306, theink jet head 306 for discharging each of the R, G, and B colors ispreviously provided for each of the three colors R, G and B so that theink jet heads 306 are successively used to form an arrangement of thethree colors of R, G and B on the mother board 301, as shown in FIG.22(b).

[0010] The number of the nozzles provided on the ink jet head 306 isgenerally about 160 to 180. The mother board 301 generally has a largerarea than the ink jet head 306. Therefore, in forming the filterelements 303 on the surface of the mother board 301 by using the ink jethead 306, the ink jet head 306 must be moved several times on the motherboard 301 by main scanning while being moved relative to the motherboard 301 by sub-scanning to discharge ink during each time of mainscanning, drawing a pattern.

[0011] However, this method has the problem of requiring a long drawingtime, i.e., a long time for producing a color filter, because of thelarge number of times of scanning of the mother board 301 with the inkjet head. In order to solve this problem, the applicant proposed amethod in Japanese Application No. 11-279752 in which a plurality ofheads are linearly arranged and supported by a supporting member toincrease the substantial nozzle number.

[0012] By using this method, for example, as shown in FIG. 23(a), aplurality of heads 306, e.g., six heads 306, are linearly supported by asupporting member 307, and a main scanning can be performed numeroustimes, as shown by arrows A1, A2, . . . with movement of the supportingmember 307 by sub-scanning in the sub-scanning direction Y, toselectively discharge ink from each of nozzles 304 during each time ofmain scanning. This method can supply the ink to a wide area by one timeof main scanning, thereby certainly shortening the time required forproducing a color filter.

SUMMARY OF THE INVENTION

[0013] In the conventional method shown in FIG. 23(a), each of the heads306 is arranged in parallel with the sub-scanning direction Y to form alinear nozzle row, and thus the distance between the plurality of thenozzles, i.e., the nozzle pitch, must be the same as the distancebetween the filter elements 303 on the mother board 301, i.e., theelement pitch. However, it is very difficult to form an ink jet head sothat the nozzle pitch is the same as the element pitch.

[0014] A possible method for solving the problem is to incline thesupporting member 307 at an angle θ with the sub-scanning direction Y,coinciding the nozzle pitch of the heads 306 with the element pitch onthe mother board 301, as shown in FIG. 23(b). However, in this case, adeviation with a dimension Z in the main scanning direction X occurs inthe nozzle row formed by the heads 306 arranged in a row, therebycausing the problem of increasing the main scanning time for inkdischarge by a time corresponding to the deviation. Particularly, in theuse of such a six-linked structure head unit as shown in FIG. 23(b), thedeviation has a long dimension because of the long nozzle row, therebycausing the problem of the need to further increase the main scanningtime.

[0015] The present invention has been made in consideration of the aboveproblem, and an object of the present invention is to shorten thescanning time of an in ink jet head for forming a pattern of filterelements of a color filter, picture element pixels of an EL device, orthe like.

[0016] In order to achieve the object, an apparatus for discharging amaterial to an object according to the present invention can include aplurality of heads each having a nozzle row including an arrangement ofa plurality of nozzles, a supporting mechanism for supporting theplurality of the heads and a mechanism for scanning one of the objectand the supporting mechanism relative to the other, wherein the nozzlerow is inclined relative to the scanning direction. More specifically,the plurality of the heads can be supported obliquely relative to thelongitudinal direction of the supporting mechanism. The term “scanning”can mean one or both of main scanning in a main scanning direction andsub-scanning in a sub-scanning direction crossing the main scanningdirection.

[0017] In the apparatus for discharging a material of the presentinvention, a substrate is scanned with the supporting mechanism forsupporting the plurality of the heads so that the material can bedischarged from the plurality of the heads. Therefore, the scanning timecan be shortened, as compared with scanning of an object with a singlehead.

[0018] In the present invention, preferably, the plurality of the headshave substantially the same nozzle pitch of the nozzle rows, andsubstantially the same inclination angles of the nozzle rows. The reasonfor this is that the material to be discharged can be regularlydischarged to the object to facilitate control for drawing a regularpattern.

[0019] Since scanning is performed with each of the heads in an inclinedstate, the nozzle pitch of the nozzles belonging to each of the headscan be coincided with the element pitch of the filter elements formed onthe object. Furthermore, since each of the heads is inclined, and notthe entire supporting mechanism, the distance between the nozzle closestto the substrate and the nozzle far from the substrate is shorter thanthe case in which the entire supporting mechanism is inclined, therebyshortening the scanning time of the substrate with the supportingmechanism.

[0020] In another aspect of the present invention, an apparatus fordischarging a material to an object can include a plurality of headseach having a nozzle row including an arrangement of a plurality ofnozzles, a supporting mechanism for supporting the plurality of theheads, a mechanism for scanning one of the object and the supportingmechanism relative to the other, and a mechanism for controlling theangle formed by at least one of the nozzle rows and the scanningdirection. The apparatus for discharging a material preferably furtherincludes a mechanism for controlling the spacing between the pluralityof the nozzle rows.

[0021] In the apparatus for discharging a material having the aboveconstruction, the nozzle rows are set in an inclined state by the nozzlerow angle control mechanism, thereby obtaining the same effect as theabove-described apparatus for discharging a material.

[0022] In the apparatus for discharging a material, the heads supportedby the supporting mechanism can be coincided with different elementpitches by the function of the nozzle row angle control mechanism. Inthis case, the distance between the adjacent nozzle rows can beprecisely controlled by the function of the nozzle row spacing controlmechanism so that the nozzle rows continue with a constant nozzle pitch.

[0023] It is to be understood that the nozzle row angle controlmechanism and the nozzle row spacing control mechanism are not limitedto special structures, and the above-described functions can be achievedby any achievable structure. For example, the nozzle row angle controlmechanism can be achieved by the following: each of the heads is mountedon the supporting mechanism to be rotatable in a plane, and connected toa power source such as a pulse motor, a servo motor, or the like, whichcan control a rotational angle, directly or indirectly through a powertransmission mechanism. In this construction, the inclination angle ofeach nozzle row can be controlled to a desired value by controlling theoutput angle value of the power source, and the inclination angle ofeach nozzle row can also be fixed to the desired value by maintainingthe output shaft of the power source in a lock state after control ofthe angle.

[0024] The nozzle spacing control mechanism is also not limited to aspecial structure, and the function can be achieved by any achievablestructure. For example, the function can be achieved by a structure inwhich the planar rotation center of each of the heads is slidablymounted on the supporting member, and the heads are connected toreciprocating slide movement driving means. The reciprocating slidemovement driving means can be formed by, for example, a slide drivingdevice comprising as a power source a rotating device such as a pulsemotor, a servo motor, or the like, which can control the rotationalangle, and a slide driving device comprising a linear movement drivingsource such as a linear motor, or the like.

[0025] The mechanism for controlling the angle formed by the nozzle rowand the scanning direction can preferably control the angle so that theplurality of heads substantially the same nozzle pitch and substantiallythe same inclination angle of the nozzle rows.

[0026] A method of discharging a material to an object according to thepresent invention can include scanning either a plurality of heads or asupporting mechanism for supporting the plurality of the heads relativeto the other, the heads each having a nozzle row comprising anarrangement of a plurality of nozzles and discharging the material tothe object, wherein at least one of the nozzle rows is inclined relativeto the scanning direction. In this case, one of the object and thesupporting member is scanned relative to the other in a main scanningdirection or a sub-scanning direction crossing the main scanningdirection, or in both directions.

[0027] Preferably, the plurality of the heads have substantially thesame nozzle pitch and substantially the same inclination angle of thenozzle rows.

[0028] The method for discharging a material preferably furthercomprises the step of controlling the angle formed by at least one ofthe nozzle rows and the scanning direction, or the step of controllingthe spacing between the plurality of nozzle rows.

[0029] The apparatus and method for discharging a material can be usedfor, for example, an apparatus for producing a color filter bydischarging a filter material to a substrate, a method of producing acolor filter, an apparatus and method for manufacturing an EL device bydischarging an EL luminescent material to a substrate, etc. Of course,applications are not limited to these apparatuses and methods, and thereare applications to various technical fields.

[0030] Particularly, a component produced by a production methodincluding the method of discharging a material can be used forelectronic apparatuses such as a cell phone, a portable computer, andthe like.

[0031] An apparatus for producing a color filter of the presentinvention can include a plurality of heads each having a nozzle rowcomprising an arrangement of a plurality of nozzles, and a supportingmechanism for supporting the plurality of the heads, wherein thesupporting mechanism supports the plurality of heads in an inclinedstate.

[0032] In this construction, a filter possibly comprises colorants ofthe three primary colors including R (red), G (green), and B (bleu), orC (cyan), Y (yellow) and M (magenta), for example.

[0033] The apparatus for producing a color filter can discharge a filtermaterial from the plurality of heads during main scanning of a substratewith supporting mechanism for supporting the plurality of heads,shortening the scanning time, as compared with scanning of an objectsurface with a single head.

[0034] Since scanning is performed with each of the heads in an inclinedstate, the nozzle pitch of the nozzles belonging to each of the headscan be coincided with the element pitch of the filter elements formed onthe substrate. Furthermore, since each of the heads is inclined, and notthe entire supporting mechanism, the distance between the nozzle closestto the substrate and the nozzle far from the substrate is shorter thanthe case in which the entire supporting mechanism is inclined, therebyshortening the scanning time of the substrate with the supportingmechanism. Therefore, the time required for producing a color filter canbe shortened.

[0035] In the apparatus for producing a color filter having the aboveconstruction, the supporting mechanism can support the heads in a fixedstate, or in a state wherein the inclination angle and/or thehead-to-head distance can be changed.

[0036] In the apparatus for producing a color filter having the aboveconstruction, preferably, the plurality of the heads have substantiallythe same nozzle pitch of the nozzle rows, and substantially the sameinclination angle of the nozzle rows. This can facilitate control forfeeding the filter material to desired positions.

[0037] The inclination angles of the nozzle rows are preferably the samein magnitude, but the inclination angles may change in direction betweenthe plus and minus directions. Hereinafter, “substantially the same” canmean cases including a case in which no great difference occurs infunctions even when a small difference occurs due to error inproduction.

[0038] In a further aspect of the present invention, an apparatus forproducing a color filter can include a plurality of heads each having anozzle row including an arrangement of a plurality of nozzles; amechanism for supplying a filter material to the heads, a supportingmechanism for supporting the plurality of the heads, a main scanningmechanism for performing main scanning with the supporting mechanism, asub-scanning mechanism for performing sub-scanning with the supportingmechanism, and a nozzle row angle control mechanism for controlling theinclination angles of the plurality of nozzle rows, and a nozzle rowspacing control mechanism for controlling the spacing between theplurality of nozzle rows.

[0039] In the apparatus for producing a color filter having the aboveconstruction, each of the nozzle rows is set in an inclined state by thenozzle row angle control mechanism, thereby obtaining the same effect asthe above-described apparatus for producing a color filter.

[0040] In the apparatus for producing a second color filter, the headssupported by the supporting mechanism can easily be coincided withdifferent element pitches by the function of the nozzle row anglecontrol mechanism. In this case, the distance between the adjacentnozzle rows can be precisely controlled by the function of the nozzlerow spacing control mechanism so that the nozzle rows continue with aconstant nozzle pitch.

[0041] It should be understood that the nozzle row angle controlmechanism and the nozzle row spacing control mechanism are not limitedto special structures, and the above-described functions can be achievedby any achievable structure. For example, the same structures asdescribed above for the apparatus for discharging a material can beused.

[0042] In the apparatus for producing a color filter, preferably, theplurality of heads have substantially the same nozzle pitch andsubstantially the same inclination angles of the nozzle rows.

[0043] A method of producing a color filter according to the presentinvention can include scanning a plurality of heads each having a nozzlerow having an arrangement of a plurality of nozzles in a main scanningdirection while discharging a filter material from the plurality ofnozzles to form filter elements on a substrate, wherein a plurality ofheads are provided and arranged in an inclined state.

[0044] In the above method of producing a color filter, the plurality ofthe heads are moved simultaneously in a main scanning direction so thatthe material can be discharged from each of the heads. Therefore, thescanning time can be shortened, as compared with scanning of thesubstrate surface with a single head.

[0045] Since scanning is performed with each of the heads in an inclinedstate, the nozzle pitch of the nozzles belonging to each of the headscan be coincided with the element pitch of the filter elements formed onthe substrate. Furthermore, since each of the heads is inclined, not arow of the plurality of heads, the distance between the nozzle closestto the substrate and the nozzle far from the substrate is shorter thanthe case in which the head row is inclined, thereby shortening thescanning time of the substrate with the plurality of nozzle rows.Therefore, the time required for producing a color filter can beshortened.

[0046] In the method of producing a color filter having the aboveconstruction, preferably, the plurality of the heads have substantiallythe same nozzle pitch and substantially the same inclination angle ofthe nozzle rows.

[0047] An apparatus for manufacturing a liquid crystal device of thepresent invention can include a plurality of heads each having a nozzlerow having an arrangement of a plurality of nozzles, a mechanism thatsupplies a filter material to the heads, a supporting mechanism thatsupports the plurality of the heads, a main scanning mechanism thatmoves the supporting mechanism by main scanning, and a sub-scanningmechanism that moves the supporting mechanism by sub-scanning, whereinthe supporting mechanism supports the plurality of heads in an inclinedstate.

[0048] The apparatus for manufacturing a liquid crystal device candischarge ink, i.e., a filter material, from the plurality of headsduring main scanning of a substrate with supporting mechanism thatsupports the plurality of heads, shortening the scanning time, ascompared with scanning of a substrate surface with a single head.

[0049] Since scanning is performed with the each of the heads in aninclined state, the nozzle pitch of the nozzles belonging to each of theheads can be coincided with the element pitch of the filter elementsformed on the substrate. Furthermore, since each of the heads isinclined, and not the entire supporting mechanism, the distance betweenthe nozzle closest to the substrate and the nozzle far from thesubstrate is shorter than the case in which the entire supporting meansis inclined, thereby shortening the scanning time of the substrate withthe supporting means. Therefore, the time required for producing a colorfilter can be shortened.

[0050] A method of manufacturing a liquid crystal device of the presentinvention can include moving, in a main scanning direction, a headhaving a nozzle row having an arrangement of a plurality of nozzleswhile discharging a filter material from the plurality of nozzles toform a filter element on a substrate, wherein a plurality of the headsare provided to be arranged in an inclined state.

[0051] The manufacturing method can discharge ink from the plurality ofheads while simultaneously moving the plurality of heads by mainscanning, shortening the scanning time, as compared with scanning of asubstrate surface with a single head.

[0052] Since scanning is performed with the each of the heads in aninclined state, the nozzle pitch of the nozzles belonging to each of theheads can be coincided with the element pitch of the filter elementsformed on the substrate. Furthermore, since each of the heads isinclined, and not a row of the plurality of heads, the distance betweenthe nozzle closest to the substrate and the nozzle far from thesubstrate is shorter than the case in which the head row is inclined,thereby shortening the scanning time of the substrate with the pluralityof nozzle rows. Therefore, the time required for producing a colorfilter, i.e., the time required for manufacturing a liquid crystaldevice, can be shortened.

[0053] An apparatus for manufacturing an EL device of the presentinvention can include a plurality of heads each having a nozzle rowincluding an arrangement of a plurality of nozzles, a mechanism thatsupplies an EL luminescent material to the heads, a supporting mechanismthat supports the plurality of the heads, a main scanning mechanism thatmoves the supporting mechanism by main scanning, a sub-scanningmechanism that moves the supporting mechanism by sub-scanning, a nozzlerow angle control mechanism for controlling the inclination angles ofthe plurality of the nozzle rows, and a nozzle row spacing controlmechanism for controlling the distance between the plurality of thenozzle rows.

[0054] The apparatus for manufacturing an EL device can discharge ink,i.e., an EL luminescent material, from the plurality of heads duringmain scanning of a substrate with the supporting mechanism that supportsthe plurality of heads, shortening the scanning time, as compared withscanning of a substrate surface with a single head.

[0055] Since scanning is performed with the each of the heads in aninclined state, the nozzle pitch of the nozzles belonging to each of theheads can be coincided with the pixel pitch of the picture elementpixels formed on the substrate. Furthermore, since each of the heads isinclined, and not the entire supporting mechanism, the distance betweenthe nozzle closest to the substrate and the nozzle far from thesubstrate is shorter than the case in which the entire supportingmechanism is inclined, thereby shortening the scanning time of thesubstrate with the supporting mechanism. Therefore, the time requiredfor manufacturing an EL device can be shortened.

[0056] A method of manufacturing an EL device of the present inventioncan include moving, in a main scanning direction, a head having a nozzlerow having an arrangement of a plurality of nozzles while discharging anEL luminescent material from the plurality of nozzles to form an ELluminescent layer on a substrate, wherein a plurality of the heads areprovided to be arranged in an inclined state.

[0057] The apparatus for manufacturing an EL device can discharge ink,i.e., an EL luminescent material, from the plurality of heads whilesimultaneously moving the plurality of heads by main scanning,shortening the scanning time, as compared with scanning of a subjectsurface with a single head.

[0058] Since scanning is performed with the each of the heads in aninclined state, the nozzle pitch of the nozzles belonging to each of theheads can be coincided with the pixel pitch of the picture elementpixels formed on the substrate. Furthermore, since each of the heads isinclined, and not a row of the plurality of heads, the distance betweenthe nozzle closest to the substrate and the nozzle far from thesubstrate is shorter than the case in which the head row is inclined,thereby shortening the scanning time of the substrate with the pluralityof nozzle rows. Therefore, the time required for producing an EL devicecan be shortened.

BRIEF DESCRIPTION OF THE DRAWINGS

[0059] The invention will be described with reference to theaccompanying drawings, in which like elements are referred to with likenumbers, and in which:

[0060]FIG. 1 is a plan view schematically showing a main step of aproduction method using an apparatus for producing a color filteraccording to an embodiment of the present invention;

[0061]FIG. 2 is a perspective view of the ink jet head shown in FIG. 1;

[0062]FIG. 3 is a plan view of schematically showing a main step of aproduction method using an apparatus for producing a color filteraccording to another embodiment of the present invention;

[0063]FIG. 4 is a perspective view of the ink jet head shown in FIG. 3;

[0064]FIG. 5 is a plan view of schematically showing a main step of aproduction method using an apparatus for producing a color filteraccording to still another embodiment of the present invention;

[0065]FIG. 6(a) is a plan view showing a color filter according to anembodiment of the present invention;

[0066]FIG. 6(b) is a plan view showing a mother board serving as a baseof the color filter according to an embodiment of the present invention;

[0067]FIG. 7 is a sectional view schematically showing the steps forproducing a color filter, taken along line VII-VII in FIG. 6(a);

[0068]FIG. 8 is a drawing showing examples of arrangement of pictureelement pixels of the three colors R, G and B in a color filter;

[0069]FIG. 9 is a perspective view showing an ink jet apparatusaccording to an embodiment of the present invention;

[0070]FIG. 10 is an enlarged perspective view showing a main portion ofthe apparatus shown in FIG. 9;

[0071]FIG. 11 is a perspective view showing a head provided in the inkjet head shown in FIG. 1;

[0072]FIG. 12 is a perspective view showing a modified example of ahead;

[0073]FIG. 13 is a drawing showing the internal structure of a head, inwhich FIG. 13(a) is a partially cut-away perspective view, and FIG.13(b) is a sectional view taken along line J-J in FIG. 13(a);

[0074]FIG. 14 is a block diagram showing en electric control system usedin the ink jet head apparatus shown in FIG. 9;

[0075]FIG. 15 is a flowchart showing a flow of control executed by thecontrol system shown in FIG. 14;

[0076]FIG. 16 is a perspective view showing another modified example ofa head;

[0077]FIG. 17 is a drawing showing the steps of a method ofmanufacturing a liquid crystal device according to an embodiment of thepresent invention;

[0078]FIG. 18 is an exploded perspective view showing an example of aliquid crystal device manufactured by the method of manufacturing aliquid crystal device of the present invention;

[0079]FIG. 19 is a sectional view showing the sectional structure of theliquid crystal device taken along line X-X in FIG. 18;

[0080]FIG. 20 is a drawing showing the steps of a method ofmanufacturing an EL device according to an embodiment of the presentinvention;

[0081]FIG. 21 is a sectional view of the EL device corresponding to thesteps shown in FIG. 20;

[0082]FIG. 22 is a drawing showing an example of a conventional methodof producing a color filter; and

[0083]FIG. 23 is a drawing showing another example of a conventionalmethod of producing a color filter.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

[0084] A method and apparatus for producing a color filter according toan embodiment of the present invention will be described below. Beforethe production method and apparatus are described, a color filterproduced by the production method is described. FIG. 6(a) schematicallyshows the planar structure of a color filter according to an embodiment.FIG. 7(d) shows a sectional structure taken along line VII-VII in FIG.6(a).

[0085] The color filter 1 of this embodiment includes a plurality offilter elements 3 which are formed in a dot pattern, which is in thisembodiment a dot matrix, on a surface of a rectangular substrate 2 madeof glass, plastic, or the like, and a protecting film 4 laminated on thefilter elements 3 as shown in FIG. 7(d). FIG. 6(a) is a plan view of thecolor filter 1 with the protecting film 4 being removed. Namely, in thisembodiment, a color pattern formed by ink jet is illustrated by thefilter elements 3.

[0086] The filter elements 3 can be formed by filling colorants in aplurality of rectangular regions, which are arranged in a dot matrix andare divided by a partition 6 made of a non-transmissive resin materialand formed in a lattice pattern. Each of the filter elements 3 is madeof any one of colorants of R (red), G (green) and B (blue), and thefilter elements 3 of each color are arranged in a predetermined pattern.As the arrangement, for example, the stripe arrangement shown in FIG.8(a), the mosaic arrangement shown in FIG. 8(b), and the deltaarrangement shown in FIG. 8(c) are known.

[0087] In the stripe arrangement, all filter elements in each column ofa matrix are the same color. In the mosaic arrangement, any three filterelements arranged in a vertical and horizontal lines are respectively R(red), G (green) and B (blue). In the delta arrangement, the filterelements are arranged to be staggered so that any three adjacent filterelements are respectively the three colors of R, G and B.

[0088] The size of the color filter 1 is, for example, 1.8 inches. Thesize of each of the filter elements 3 is, for example, 30 μm×100 μm. Thedistance between the respective filter elements 3, i.e., the elementpitch, is 75 μm, for example.

[0089] When the color filter 1 of this embodiment is used as an opticalelement for a full-color display, the three filter elements 3 of the R,G, and B colors are combined as a unit to form a pixel, and light isselectively transmitted through any one of R, G and B or a combinationthereof in each pixel to perform a full-color display. In this case, thepartition 6 made of a non-transmissive resin material functions as ablack matrix.

[0090] The color filter 1 is cut out of a large-area mother board 12,for example, as shown in FIG. 6(b). Specifically, a pattern for onecolor filter is formed on the surface of each of a plurality of colorfilter formation areas 11 set in the mother board 12, cutting groovesare formed around the color filter formation areas 11, and then themother board 12 is cut along the grooves to form the respective colorfilters 1.

[0091] The method and apparatus for producing the color filter 1 shownin FIG. 6(a) will be described below.

[0092]FIG. 7 schematically shows the steps of the method of producingthe color filter 1. First, the partition 6 made of a non-transmissiveresin material can be formed in a lattice pattern on the surface of themother board 12, as viewed from the direction of arrow B. The latticeholes 7 of the lattice pattern are areas in which the filter elements 3are formed, i.e., the filter element areas. Each of the filter elementformation areas 7 formed by the partition 6 has planar dimensions of,for example, about 30 μm×100 μm, as viewed from the direction of arrowB.

[0093] The partition 6 can function to prohibit a flow of ink, i.e., afilter element material, supplied to the filter element formation areas7, and function as the black matrix. The partition 6 is formed by anydesired patterning method, for example, a photolithography method, andis further heated by a heater according to demand.

[0094] After the partition 6 is formed, droplets 8 of a filter elementmaterial are supplied to each of the filter element formation areas 7 tofill each of the filter element areas 7 with a filter element material13, as shown in FIG. 7(b). In FIG. 7(b), reference numeral 13R denotesthe filter element material having R (red) color, reference numeral 13Gdenotes the filter element material having G (green) color, andreference numeral 13B denotes the filter element material having B(blue) color.

[0095] After a predetermined amount of the filter element material issupplied to each of the filter element formation areas 7, the motherboard 12 is heated to about 70° C. by the heater to evaporate thesolvent of the filter element materials. The evaporation decreases thevolume of the filter element materials 13 to planarize the surface, asshown in FIG. 7(c). When the volume is extremely decreased, droplets ofthe filter element materials are supplied and heated repeatedly untilthe color filter has a sufficient thickness. By the above-describedprocess, only the solid contents of the filter element materials finallyremains to form films, thereby forming the filter elements 3 of each ofthe desired colors.

[0096] After the filter elements 3 are formed as described above,heating is carried out at a predetermined temperature for apredetermined time in order to completely dry the filter elements 3.Then, the protecting film 4 is formed by using an appropriate method,for example, a spin coating method, a roll coating method, a dippingmethod, or the like. The protecting film 4 is formed for protecting thefilter elements 3 and for planarizing the surface of the color filter 1.

[0097]FIG. 9 shows a component device of an apparatus for producing acolor filter, i.e., an ink jet apparatus for supplying the filterelement materials shown in FIG. 7(b) in accordance with an embodiment.The ink jet apparatus 16 is an apparatus for discharging and adheringthe filter element material of one of the colors R, G and B, forexample, R color, as ink droplets to a predetermined position in each ofthe color filter formation areas 11 of the mother board 12 (refer toFIG. 6(b)). Although an ink jet apparatus is prepared for the filterelement materials of each of the G and B colors, these ink jetapparatuses for the G and B colors are not described below because thestructures thereof are the same as FIG. 9.

[0098] In FIG. 9, the ink jet apparatus 16 can include a head unit 26having an ink jet head 22, a head position control device 17 forcontrolling the position of the ink jet head 22, a board positioncontrol device 18 for controlling the position of the mother board 12, amain scanning driving device 19 for moving the ink jet head 22 relativeto the mother board 12 by main scanning, a sub-scanning driving device21 for moving the ink jet head 22 relative to the mother board 12 bysub-scanning, a board feeder 23 for feeding the mother board 12 to apredetermined working position in the ink jet apparatus 16, and acontrol device 24 for controlling the entirety of the ink jet apparatus16.

[0099] The head position control device 17, the board position controldevice 18, the main scanning driving device 19 and the sub-scanningdriving device 21 are provided on a base 9. These devices are coveredwith a cover 14 according to demand.

[0100] The ink jet head 22 has a plurality of heads 20, in thisembodiment, six heads 20, and a carriage 25 serving as a supportingmechanism that supports the heads 20 arranged, as shown in FIG. 2. Thecarriage 25 has holes, i.e., recesses, which are slightly larger thanthe heads 20 and which are formed at supporting positions of the heads20, so that the heads 20 are respectively placed in the holes, and fixedby screws, an adhesive, or another tightening technique. When thepositions of the heads 20 relative to the carriage 25 are preciselydetermined, the heads 20 may be fixed by simply pressing them into theholes, without using special tightening techniques.

[0101] Each of the heads 20 has a nozzle row 28 including a plurality ofnozzles 27 arranged in a row, for example, as shown in FIG. 11. Thenumber of the nozzles 27 is, for example, 180, and the hole diameter ofthe nozzles 27 is, for example, 28 μm. The nozzle pitch of the nozzles27 is, for example, 141 μm. In FIGS. 6(a) and 6(b), the main scanningdirection X of the mother board 12, and the sub-scanning direction Yperpendicular to the main scanning direction X are set as shown in FIG.11.

[0102] In FIG. 2, each of the heads 20 is mounted on the carriage 25 sothat the nozzle row 28 of each head extends in a direction K0 at anangle θ with the axis line K1 of the carriage 25 in the longitudinaldirection. In this embodiment, the ink jet head 22 is positioned so thatthe axis line K1 of the carriage 25 extends in a direction crossing themain scanning direction X, e.g., in this embodiment, the perpendiculardirection, as shown in FIG. 1. Namely, each of the nozzle rows 28 ispositioned obliquely at an angle θ with the sub-scanning direction Yperpendicular to the main scanning direction.

[0103] The ink jet head 22 is moved in parallel to the X direction toperform main scanning of the mother board 12. During this main scanning,the filter element material as an ink is selectively discharged from theplurality of nozzles 27 of each of the heads 20 to adhere the filterelement material at predetermined positions in the mother board 12. Theink jet head 22 can be moved by a predetermined distance in thesub-scanning direction, for example, moved by a length corresponding toor larger or shorter than six times the length of the component of eachnozzle row 28 in the sub-scanning direction Y, to shift the mainscanning position of the ink jet head 22 by the predetermined distance.

[0104] Each of the heads 20 has an internal structure, for example,shown in FIGS. 13(a) and 13(b). Specifically, the head 20 includes astainless steel nozzle plate 29, a vibrating plate 31 opposed to thenozzle plate 29, and a plurality of partition members 32 for connectingthe nozzle plate 29 and the vibrating plate 31. The partition members 32form a plurality of ink chambers 33 and a liquid reservoir 34 betweenthe nozzle plate 29 and the vibrating plate 31. The plurality of the inkchambers 33 communicate with the liquid reservoir 34 through passages38.

[0105] Also, an ink supply hole 36 can be formed at a proper position ofthe vibrating plate 31, and an ink supply device 37 is connected to theink supply hole 36. The ink supply device 37 supplies the filter elementmaterial M of one of the R, G and B colors, for example, R color, to theink supply hole 36. The supplied filter element material M is stored inthe liquid reservoir 34, and is further passed through the passages 38to fill the ink chambers 33.

[0106] The nozzle plate 29 includes the nozzles 27 for jetting thefilter element material M from the ink chambers 33. Furthermore, inkpressing members 39 are provided on the back of the vibrating plate 31,which is opposite to the side forming the ink chambers 33, correspondingto the ink chambers 33. Each of the ink pressing members 39 can furtherinclude a piezoelectric element 41, and a pair of electrodes 42 a and 42b which hold the piezoelectric element 41 therebetween, as shown in FIG.13(b). The piezoelectric element 41 is deformed to project outward byelectricity supplied to the electrodes 42 a and 42 b, as shown by anarrow C, increasing the volume of the corresponding ink chamber 33. As aresult, an amount of the filter element material M corresponding to theincrease in volume flows into the ink chamber 33 from the liquidreservoir 34 through the passage 38.

[0107] When electrification of the piezoelectric element 41 is stopped,both the piezoelectric element 41 and the vibrating plate 31 return tothe initial shapes. As a result, the ink chamber 33 also returns to theinitial volume to increase the pressure of the filter element material Min the ink chamber 33, thereby ejecting the filter element M as droplets8 to the mother board 12 (refer to FIG. 6(b)) from the nozzle 27. Inaddition, a waste ink layer 43 having, for example, aNi-tetrafluoroethylene eutectoid plated layer is provided around thenozzle 27, for preventing a bend of the flying droplets 8, clogging ofthe nozzle 27, etc.

[0108] In FIG. 10, the head position control device 17 can include a αmotor 44 for rotating the ink jet head 22 in a plane, a β motor 46 foroscillating and rotating the ink jet head 22 around an axis parallel tothe sub-scanning line Y, a γ motor 47 for oscillating and rotating theink jet head 22 around an axis parallel to the main scanning line X, anda Z motor 48 for moving the ink jet head 22 in parallel to the verticaldirection.

[0109] In FIG. 10, the board position control device 18 shown in FIG. 9includes a table 49 on which the mother board 12 is mounted, and a θmotor 51 for rotating the table 49 in a plane as shown by arrow θ. Themain scanning driving device 19 shown in FIG. 9 can include a guide rail52 extending in the main scanning direction X, and a slider 53containing a pulse-driven linear motor. When the linear motor isoperated, the slider 53 is moved in parallel to the main scanningdirection along the guide rail 52.

[0110] In FIG. 10, the sub-scanning driving device 21 shown in FIG. 9has a guide rail 54 extending in the sub-scanning direction Y, and aslider 56 containing a pulse-driven linear motor. When the linear motoris operated, the slider 56 is moved in parallel to the sub-scanningdirection Y along the guide rail 54.

[0111] The pulse-driven linear motor contained in each of the slider 53and the slider 56 can precisely control the rotational angle of theoutput shaft by a pulse signal supplied to the motor, thereby preciselycontrolling the position of the ink jet head 22 supported by the slider53 on the main scanning direction X, the position of the table 49 on thesub-scanning direction, and the like. It is to be understood that theposition control of the ink jet head 22 and the table 49 is not limitedto the method using a pulse motor, and the position control can also berealized by a feedback control method using a servo motor, or any othercontrol method.

[0112] The board supply device 23 shown in FIG. 9 includes a boardreceiving unit 57 that receives the mother board 12, and a robot 58 fortransferring the mother board 12. The robot 58 comprises a base 59installed on an installation plane such as a floor, the ground, or thelike, an elevating shaft 61 which moves up and down relative to the base59, a first arm 62 rotating around the elevating shaft 61, a second arm63 rotating relative to the first arm 62, a suction pad 64 provided atthe bottom of the tip of the second arm 63. The suction pad 64 canattract the mother board 12 by air suction, or the like.

[0113] In FIG. 9, a capping device 76 and a cleaning device 77 aredisposed on one side of the sub-scanning driving device 21 in the locusof the ink jet head 22 driven by the main scanning driving device 19 formain scanning. Also, an electronic balance 78 is disposed on the otherside. The cleaning device 77 is a device for cleaning the ink jet head22. The electronic balance 78 is a device for measuring the weight ofthe ink droplets discharged from each of the nozzles 27 (refer to FIG.11) of the ink jet head 22. The capping device 76 is a device forpreventing the nozzles 27 (refer to FIG. 11) from being dried when theink jet head 22 is in a standby state.

[0114] Furthermore, a head camera 81 is disposed near the ink jet head22 so as to move together with the ink jet head 22. A board camera 82supported by a supporting device (not shown in the drawing) provided onthe base 9 is disposed at position where the mother board 12 can bephotographed.

[0115] The control device 24 shown in FIG. 9 can include a computer body66 containing a processor, a keyboard 67 serving as an input device, anda CRT (Cathode Ray Tube) display 68 serving as a display device. Theprocessor has a CPU (Central Processing Unit) 69 for arithmeticprocessing, and a memory, i.e., an information storage medium 71, forstoring various items of information.

[0116] The head position control device 17, the board position controldevice 18, the main scanning driving device 19, the sub-scanning drivingdevice 21, and a head driving circuit 72 that drives the piezoelectricelements 41 (refer to FIG. 13(b)) in the ink jet head 22 are connectedto the CPU 69 through an input/output interface 73 and a bus 74, asshown in FIG. 14. The board supply device 23, the input device 67, thedisplay 68, the electronic balance 78, the cleaning device 77 and thecapping device 76 are also connected to the CPU 69 through theinput/output interface 73 and the bus 74.

[0117] The memory 71 is a concept including semiconductor memory such asRAM (Random Access Memory), ROM (Read Only Memory), and the like,external storage devices such as a hard disk, a CD-ROM reader, adisk-type storage medium, and the like. Functionally, there are set astorage area for storing a program software in which the controlprocedure for operation of the ink jet apparatus 16 is written, astorage area for storing, as coordinate data, the discharge positions ofone (for example, R color) of R, G and B in the mother board 12 in orderto realize the various RGB arrangements shown in FIG. 8, a storage areafor storing an amount of sub-scanning of the mother board 12 in thesub-scanning direction Y shown in FIG. 10, areas functioning as a workarea and a temporary file for the CPU 69, and other various areas.

[0118] The CPU 69 controls the discharge of ink, i.e., the filterelement material, at predetermined positions on the surface of themother board 12 according to the program software stored in the memory71, and the specific function realizing units include a cleaningoperation unit for executing an arithmetic operation for realizing acleaning process, a capping operation unit for realizing a cappingprocess, a weight measurement operation unit for executing an arithmeticoperation for realizing weight measurement using the electronic balance78 (refer to FIG. 9), and a drawing operation unit for executing anarithmetic operation for drawing a pattern of the filter elementmaterial by ink jet.

[0119] More specifically, the drawing operation unit is divided intovarious functional operation units such as a drawing start positionoperation unit for setting the ink jet head 22 at the initial positionfor drawing, the main scanning control operation unit for executing anarithmetic operation of control for moving the ink jet head 22 in themain scanning direction X at a predetermined speed, a sub-scanningcontrol operation unit for executing an arithmetic operation of controlfor shifting the mother board 12 in the sub-scanning direction Y by apredetermined amount of sub-scanning, a nozzle discharge controloperation unit for executing an arithmetic operation of control fordetermining which nozzle of the plurality of nozzles 27 of the ink jethead 22 is operated to discharge ink, i.e., the filter element material,etc.

[0120] In this embodiment, each of the above-descried functions isrealized by using the CPU 69 based on the software. However, when eachof the functions can be realized by a single electronic circuit withoutusing the CPU, such an electronic circuit can be used.

[0121] The operation of the ink jet apparatus 16 having theabove-described configuration will be described below based on theflowchart shown in FIG. 15. When an operator turns on a power supply tostart the ink jet apparatus 16, initial setting is first executed inStep S1. Specifically, the head unit 26, the board supply device 23, thecontrol device 24, etc. are set in the predetermined initial state.

[0122] Next, when a weight measurement time comes (“YES” in Step S2),the head unit 26 is moved to the electronic balance 78 shown in FIG. 9by the main scanning driving device 19 (Step S3) to measure the weightof the ink discharged from each of the nozzles 27 by using theelectronic balance 78 (Step S4). Therefore, the voltage applied to thepiezoelectric element 41 corresponding to each of the nozzles 27 iscontrolled according to the ink discharge properties of the nozzles 27(Step S5).

[0123] Next, when a cleaning time comes (“YES” in Step S6), the headunit 26 is moved to the cleaning device 77 by the main scanning drivingdevice 19 (Step S7) to clean the ink jet head 22 by the cleaning device77 (Step S8).

[0124] When it is neither weight measurement time nor cleaning time(i.e., “NO” in Steps S2 and S6), or when these processes are finished,the board supply device 23 shown in FIG. 9 is operated to supply themother board 12 to the table 49 in Step S9. Specifically, the motherboard 12 received in the board receiving unit 57 is suctionally held bythe suction pad 64, and then the elevating shaft 61, the first arm 62and the second arm 63 are moved to transfer the mother board 12 to thetable 49. Furthermore, the mother board 12 is pressed on positioningpins (refer to FIG. 10) provided in advance at proper positions of thetable 49. In order to prevent a positional deviation of the mother board12 on the table 49, the mother board 12 is preferably fixed to the table49 by an air suction device or the like.

[0125] Next, the output shaft of the θ motor 51 shown in FIG. 10 isrotated by a small angular unit to rotate the table 49 by a smallangular unit in a plane and position the mother board 12 while observingthe mother board 12 with the board camera 82 shown in FIG. 9 (Step S10).Next, the start position of drawing by the ink jet head 22 is determinedby an arithmetic operation while observing the mother board 12 by thehead camera 81 shown in FIG. 9 (Step S11), and then the main scanningdriving device 19 and the sub-scanning driving device 21 areappropriately operated to move the ink jet head 22 to the drawing startposition (Step S12).

[0126] At the same time, the ink jet head 22 is set so that the axisline K1 of the carriage 25 is perpendicular to the main scanningdirection X, as shown in FIG. 1. Therefore, the nozzle rows 28 arearranged obliquely at an angle θ with the sub-scanning direction Y ofthe ink jet head 22. This is a method for geometrically coinciding thedimensional component of the nozzle pitch in the sub-scanning directionY with the element pitch when the ink jet head 22 is moved in the mainscanning direction X. This is because in a general ink jet apparatus,the nozzle pitch corresponding to the distance between the adjacentnozzles 27 is frequently different from the element pitch correspondingto the distance between the adjacent filter elements 3, i.e., theadjacent filter element formation areas 7.

[0127] When the ink jet head 22 is set at the drawing start position inStep S12 shown in FIG. 15, main scanning is started in the main scanningdirection X in Step S13, and at the same time, discharge of ink isstarted. More specifically, the main scanning driving device 19 shown inFIG. 10 is operated to linearly move the ink jet head 22 in the mainscanning direction X shown in FIG. 1 at a constant speed. When thenozzle 27 reaches the corresponding filter element formation area 7 towhich ink should be supplied during movement, the ink, i.e., the filterelement material, is discharged from the nozzle 27 to fill the area 7,forming the filter element 3.

[0128] When one time of main scanning is completed for the mother board12 (“YES” in Step S14), the ink jet head 22 returns to the initialposition by reverse movement (Step S15). Furthermore, the ink jet head22 is driven to be moved by the sub-scanning driving device 21 by thepredetermined amount of sub-scanning in the sub-scanning direction Y,for example, an amount corresponding to the component of the totallength of the six nozzle rows 28 in the sub-scanning direction Y (StepS16). Then main-scanning and ink discharge are repeated to fill thefilter element formation areas 7 with the filter element material,forming the filter elements 3 (Step S13).

[0129] When the operation of drawing the pattern of the filter elements3 with the ink jet head 22 is completed for the entire area of themother board 12, as described above (“YES” in Step S17), the motherboard 12 after processing is exhausted to the outside by the boardsupply device 23 or another transfer device in Step S18.

[0130] Then, the process returns to Step S2 in which the operation ofdischarging ink of any one of colors R, G and B is repeated for anothermother board 12 unless the end of processing is directed by the operator(“NO” in Step S1).

[0131] When the operation end is directed by the operator (“YES” in StepS19), the CPU 69 transfers the ink jet head 22 shown in FIG. 9 to thecapping device 76 which executes capping of the ink jet head 22 (StepS20).

[0132] After patterning of one of the three colors of R, G and B, forexample, R color, which constitute the color filter, is completed, themother board 12 is transferred to the ink jet apparatus 16 using thesecond color of the R, G and B colors, for example, G color, as a filterelement material, to perform patterning of the G color, and finallytransferred to the ink jet apparatus 16 using the third color of the R,G and B colors, for example, B color, as a filter element material, toperform patterning of the B color. As a result, the mother board 12 isproduced, in which a plurality of the color filters 1 (FIG. 6(a)) havingthe desired RGB dot arrangement such as the stripe arrangement, or thelike are formed. The mother board 12 is cut for each color filter area11 to produce a plurality of color filters 1.

[0133] In order to use the color filter 1 for a color display of aliquid crystal device, an electrode, an alignment film, etc. are furtherlaminated on the surface of the color filter 1. In this case, when themother board 12 is cut into the respective color filters 1 before theelectrode, the alignment film, etc. are laminated, the subsequent stepsof forming the electrode, etc. can be very difficult. Therefore, in thiscase, the mother board 12 is preferably cut after the necessary additionsteps of forming the electrode, the alignment film, etc. are completed,not immediately after the color filters 1 are completed on the motherboard 12.

[0134] As described above, in the method and apparatus for producing acolor filter of this embodiment, during main scanning of the substrate12 with the carriage 25 as supporting device that supports the pluralityof heads 20 as shown in FIG. 1, ink is discharged from the nozzle rows28 of the plurality of heads 20. Therefore, the scanning time can beshortened, as compared with scanning of the surface of the substrate 12with a single head, thereby shortening the time required for producing acolor filter.

[0135] Also, since main scanning is performed with the heads 20 each ofwhich is inclined at an angle θ with the sub-scanning direction Y, thenozzle pitch of the plurality of nozzles 27 belonging to each of theheads 20 can be coincided with the distance between the filter elementformation areas 7, i.e., the element pitch, on the substrate 12. Whenthe nozzle pitch is geometrically coincided with the element pitch, itis advantageous in that the positions of the nozzle rows 28 need not becontrolled in the sub-scanning direction Y.

[0136] In this embodiment, the heads 20 are fixed to the carriage 25,and thus one inclination angle θ is set for one carriage 25. Therefore,in case that the element pitch of the substrate 12 varies, anothercarriage 25 must be used for realizing the inclination angle θcorresponding to the element pitch.

[0137] In this embodiment, since the each of the heads 20 is inclined,not the entire carriage 25, the distance T between the nozzle 27 closestto the substrate 12 and the nozzle 27 far from the substrate 12 isshorter than the case in which the entire carriage 25 is inclined,thereby remarkably shortening the scanning time of the substrate 12 withthe ink jet head 22. Therefore, the time required for producing a colorfilter can be shortened.

[0138] In the production apparatus and method of this embodiment, thefilter elements 3 are formed by discharging ink from the ink jet head22, and thus has no need to pass through such a complicated step as amethod using a photolithography process, and causes no waste ofmaterials.

[0139] Although the first embodiment uses the non-transmissive resinmaterial as the partition 6, a light transmitting resin material canalso be used as the partition 6. In this case, a light shielding metalfilm or resin material may be provided at the positions corresponding tothe spaces between the respective filter elements, for example, above orbelow the partition 6, to form a black mask. Alternatively, thepartition 6 made of a transmissive resin material may be formed withoutthe black mask being provided.

[0140] It should be understood that although the first embodiment usesthe filter elements of R, G and B, of course, the filter elements arenot limited to R, G and B, and for example, C (cyan), M (magenta), and Y(yellow) may be used. In this case, filter element materials having C, Mand Y colors may be used in place of the filter element materials of R,G and B without departing from the spirit and scope of the presentinvention.

[0141]FIG. 3 schematically shows a case in which ink, i.e., a filterelement material, is discharged into each of the filter elementformation areas 7 in the color filter formation areas 11 of the motherboard 12 from the ink jet head 22 by a method and apparatus forproducing a color filter according to another embodiment of the presentinvention.

[0142] The outlines of the steps performed in this embodiment are thesame as those shown in FIG. 7, and the ink jet apparatus used fordischarging ink is also mechanically the same as the apparatus shown inFIG. 9.

[0143] This embodiment is different from the embodiment shown in FIG. 1in that the structure for supporting the heads 20 by the carriage 25 ischanged. Specifically, as shown in FIG. 4, each of the heads 20 issupported by the carriage 25 so as to be rotatable around the axis lineK2 of the head 20, i.e., rotatable in a plane, as shown by an arrow N.Each of the heads 20 is also supported by the carriage 25 so as to beslidable, i.e., movable parallel in a plane, as shown by arrow P.Furthermore, the carriage 25 is provided with a nozzle row angle controldevice 83 and a nozzle row spacing control device 84.

[0144] The nozzle row angle control device 83 individually orcollectively controls the in-plane inclination angles θ of the pluralityof nozzle rows 28. The nozzle row angle control device 83 can be formedby any desired structure, for example, a structure in which the heads 20mounted on the casing 25 so as to be rotatable in a plane as shown byarrow N are connected to a power source such as a pulse motor, a servomotor, or the like, which can control the rotational angle, directly orindirectly through a power transmission mechanism, etc. In thisstructure, the inclination angle θ of each of the nozzle rows 28 can becontrolled to a desired value by controlling the output angle value ofthe power source, and the inclination angle θ of each nozzle row 28 canbe kept at the desired value by holding the output shaft of the powersource in a lock state after the angle is controlled.

[0145] The nozzle row spacing control device 84 individually orcollectively controls the spacing between the plurality of nozzle rows28. The nozzle row spacing control device 84 can be formed by anydesired structure, for example, a structure in which the heads 20mounted on the casing 25 so as to be slidable as shown by arrow P areconnected to a slide driving device comprising as a power source arotating device such as a pulse motor, a servo motor, or the like, whichcan control the rotational angle, or a slide driving device comprising alinear driving power source such as a linear motor or the like.

[0146] In this embodiment, the nozzle row angle control device 83 shownin FIG. 4 can be operated to rotate the heads 20 in a plane as shown byarrow N in FIG. 3 to control the in-plane inclination angle θ of each ofthe heads 20 so that the nozzle pitch of the nozzle rows 28 coincideswith the element pitch of the filter element formation areas 7 on thesubstrate 12. Furthermore, the nozzle row spacing control device 84 canbe operated to control the spacing between the heads shown in FIG. 3 sothat the nozzle distance between the ends of the adjacent nozzle rows 28coincides with the element pitch on the substrate 12.

[0147] Therefore, a continuous long nozzle row having six nozzle rows 28and having a nozzle pitch coinciding with the element pitch can beformed. In this embodiment, the nozzle pitch of one ink jet head 22 isappropriately controlled to draw a pattern having different elementpitches on the substrate.

[0148]FIG. 5 schematically shows an example in which ink, i.e., a filterelement material, is discharged to each of the filter element formationareas 7 in the color filter formation areas 11 of the mother board 12from the ink jet head 22 by a method and apparatus for producing a colorfilter according to still another embodiment of the present invention.The outlines of the steps performed in this embodiment are the same asthese shown in FIG. 7, and the ink jet apparatus used for dischargingink is also mechanically the same as the apparatus shown in FIG. 9.

[0149] This embodiment is different from the embodiments shown in FIGS.1 and 3 in that the inclination angles θ of the nozzle rows 28 are thesame in magnitude, but alternately change in direction between the plusand minus directions. This method can also form a continuous long nozzlerow having six nozzle rows 28 and having a nozzle pitch coinciding withthe element pitch on the substrate 12.

[0150] This embodiment can be formed in a structure in which the nozzlerows 28 are fixed, as shown in FIG. 1, or a structure in which theinclination angles θ and nozzle row spacing between the nozzle rows canbe controlled, as shown in FIG. 3.

[0151]FIG. 12 shows a modified example of the head 20 used in thepresent invention. The head 20 shown in FIG. 12 is different from thehead 20 shown in FIG. 11 in that two nozzle rows 28 are provided in themain scanning direction X. This can supply the filter element materialto one filter element formation area 7 from two nozzles 27 formed on thesame main scanning line.

[0152] In this embodiment, the axis line K0 of the ink jet head 22 isinclined at an in-plane inclination angle θ relative to the sub-scanningdirection Y. Therefore, the nozzles 27 in the two nozzle rows 28 arepreferably arranged to be shifted to the main scanning direction X, ifseen from carriage 25, not arranged perpendicularly to the axis line K0.

[0153]FIG. 16 shows a further modified example of the head 20 used inthe present invention. The head 20 shown in FIG. 16 is different fromthe head 20 shown in FIG. 11 in that three nozzle rows including anozzle row 28R for discharging R color ink, a nozzle row 28G fordischarging G color ink and a nozzle row 28B for discharging B color inkare formed in the head 20, and the ink discharge system shown in FIGS.13(a) and 13(b) is provided for each of the three nozzle rows.Furthermore, a R ink supply device 37R is connected to the ink dischargesystem corresponding to the R color nozzle row 28R; a G ink supplydevice 37G is connected to the ink discharge system corresponding to theG color nozzle row 28G; and a B ink supply device 37B is connected tothe ink discharge system corresponding to the B color nozzle row 28B.

[0154] The outlines of the steps performed in this embodiment aresimilar to those shown in FIG. 7, and the ink jet apparatus used fordischarging ink is also mechanically the same as the apparatus shown inFIG. 9.

[0155] In the embodiment shown in FIG. 11, one nozzle row 28 is providedon the head 20, and thus the ink jet heads 22 shown in FIG. 2 must beprepared for each of the three colors R, G and B for forming the colorfilter having three colors R, G and B. On the other hand, in use of thehead 20 having the structure shown in FIG. 16, the three colors R, G andB can be simultaneously adhered by one main scanning with the ink jethead 22 having a plurality of heads 20 in the X direction, and thus onlyone ink jet head 22 may be prepared.

[0156]FIG. 17 shows a manufacturing method using an apparatus formanufacturing a liquid crystal device according to a further embodimentof the present invention. FIG. 18 shows a liquid crystal devicemanufactured by the manufacturing method according to a furtherembodiment of the present invention. FIG. 19 shows a sectional structureof the liquid crystal device taken along line X-X in FIG. 18. Before themethod and apparatus for manufacturing a liquid crystal device aredescribed, a liquid crystal device manufactured by the manufacturingmethod is described with reference to an example. The liquid crystaldevice of the embodiment is a transflective liquid crystal device whichperforms a full-color display in a single matrix system.

[0157] In FIG. 18, a liquid crystal device 101 includes a liquid crystalpanel 102, liquid crystal driving ICs 103 a and 103 b mounted on theliquid crystal panel 102, a FPC (Flexible Printed Circuit) 104 connectedas a wiring connection component to the liquid crystal panel 102, and anillumination device 106 provided as a back light on the back side of theliquid crystal panel 102.

[0158] The liquid crystal panel 102 is formed by bonding together afirst substrate 107 a and a second substrate 107 b with a sealingmaterial 108. The sealing material 108 is formed by circularly adheringan epoxy resin to the inner surface of the first substrate 107 a or thesecond substrate 107 b by, for example, screen printing or the like. Thesealing material 108 contains a spherical or cylindrical conductor 109dispersed therein and made of a conductive material, as shown in FIG.19.

[0159] In FIG. 19, the first substrate 107 a includes a plate-likesubstrate 111 a made of transparent glass, transparent plastic, or thelike. Also, a reflecting film 112 is formed on the inner surface (theupper surface shown in FIG. 19) of the substrate 111 a, an insulatingfilm 113 is laminated on the reflecting film 112, first electrodes 114 aare formed in stripes (refer to FIG. 18) on the insulating film 113 asviewed from the direction of arrow D, and an alignment film 116 a isformed on the first electrodes 114 a. Furthermore, a polarizer plate 117a is mounted on the outer surface (the lower surface shown in FIG. 19)of the substrate 111 a by bonding or the like.

[0160] Although, in FIG. 18, in order to make the arrangement of thefirst electrodes 114 a easy to understand, the stripes of the firstelectrodes 114 a are shown with larger spaces than the actual spaces,and in a smaller number than the actual number, more first electrodes114 a are actually formed on the substrate 111 a.

[0161] In FIG. 19, the second substrate 107 b includes a plate-likesubstrate 111 b made of transparent glass, transparent plastic, or thelike. Also, a color filter 118 is formed on the inner surface (the lowersurface shown in FIG. 19) of the substrate 111 b, second electrodes 114b are formed in stripes (refer to FIG. 18) perpendicularly to the firstelectrodes 114 a as viewed from the direction of arrow D, and analignment film 116 b is formed on the second electrodes 114 b.Furthermore, a polarizer plate 117 b is mounted on the outer surface(the upper surface shown in FIG. 19) of the substrate 111 b by bondingor the like.

[0162] Although, in FIG. 18, like the first electrodes 114 a, in orderto make the arrangement of the second electrodes 114 b easy tounderstand, the stripes of the second electrodes 114 b are shown withlarger spaces than the actual spaces, and in a smaller number than theactual number, more second electrodes 114 b are actually formed on thesubstrate 111 a.

[0163] In FIG. 19, a liquid crystal, for example, a STN (Super TwistedNematic) liquid crystal L, is sealed in the gap, i.e., the cell gap,surrounded by the first substrate 107 a, the second substrate 107 b andthe sealing material 108. Many spherical small spacers 119 are dispersedon the inner surface of the first substrate 107 a or the secondsubstrate 107 b so that the thickness of the cell gap is maintained bythe spacers 119 present in the cell gap.

[0164] The first electrodes 114 a and the second electrode 114 b arearranged perpendicularly to each other, and the intersections arearranged in a dot matrix, as viewed from the direction of arrow D inFIG. 19. Each of the intersections of the dot matrix forms one pictureelement pixel. The color filter 118 can include components of the colorsR (red), G (green) and B (blue), which are arranged in a predeterminedpattern, for example, a stripe pattern, a delta pattern, or a mosaicpattern, as viewed from the direction of arrow D. Each of the pictureelement pixels corresponds to each of the colors R, G and B, and a unitof the picture element pixels of the three colors R, G and B forms apixel.

[0165] The plurality of the picture element pixels, i.e., pixels, whichare arranged in a dot matrix, are selectively illuminated to display animage of a character, a numeric character, or the like on the outside ofthe second substrate 107 b of the liquid crystal panel 102. The area inwhich such an image is displayed is an effective pixel area which isshown in a planar rectangular area by an arrow V in FIGS. 18 and 19.

[0166] In FIG. 19, the reflecting film 112 is made of a light reflectingmaterial such as an APC alloy, Al (aluminum), or the like, and anaperture 121 is formed at the position corresponding to each of thepicture element pixels at the intersections of the first electrode 114 aand the second electrodes 114 b. Consequently, the apertures 121 arearranged in the same dot matrix as the picture element pixels, as viewedfrom the direction of arrow D in FIG. 19.

[0167] The first electrodes 114 a and the second electrodes 114 b aremade of, for example, a transparent conductive material ITO. Each of thealignment films 116 a and 116 b is formed by adhering a polyimide resinin a film form having a uniform thickness. The alignment films 116 a and116 b are rubbed to determine the initial orientation of the liquidcrystal molecules on the surfaces of the first substrate 107 a and thesecond substrate 107 b.

[0168] In FIG. 18, the first substrate 107 a is formed in a wider areathan the second substrate 107 b, and when both substrates are bondedtogether with the sealing material 108, the first substrate 107 a has asubstrate overhang 107 c overhanging outward from the second substrate107 b. In addition, various types of wiring such as lead wiring 114 cextending from the first electrodes 114 a, lead wiring 114 d connectedto the second electrodes 114 b on the second substrate 107 b through theconductors 109 (refer to FIG. 19) present in the sealing material 108,metal wiring 114 e connected to an input bump, i.e., an input terminal,of the liquid crystal driving IC 103 a, metal wiring 114 f connected toan input bump, i.e., an input terminal, of the liquid crystal driving IC103 b, etc. are formed in an appropriate pattern on the substrateoverhang 107 c.

[0169] In this embodiment, the lead wiring 114 c extending from thefirst electrodes 114 a and the lead wiring 114 d connected to the secondelectrodes 114 b are made of the same material ITO as the electrodes,i.e., a conductive oxide. The metal wirings 114 e and 114 f serving asinput wirings of the liquid crystal driving ICs 103 a and 103 b are madeof a metal material having a low electric resistance value, for example,an APC alloy. The APC alloy mainly contains Ag, and Pd and Cu asadditive components, and is composed of 98% of Ag, 1% of Pd, and 1% ofCu.

[0170] The liquid crystal driving ICs 103 a and 103 b are mounted on thesurface of the substrate overhang 107 c by bonding with an ACF(Anisotropic Conductive Film) 122. Namely, in this embodiment, theliquid crystal panel is a so-called COG (Chip On Glass) type liquidcrystal panel having a structure in which a semiconductor chip ismounted directly on a substrate. In the COG type mounting structure, theinput-side bumps of the liquid crystal driving ICs 103 a and 103 b areconductively connected to the metal wirings 114 e and 114 f, and theoutput-side bumps of the liquid crystal driving ICs 103 a and 103 b areconductively connected to the lead wirings 114 c and 114 d.

[0171] In FIG. 18, the FPC 104 includes a flexible resin film 123, acircuit 126 including chip parts 124, and metal wiring terminal 127. Thecircuit 126 is mounted directly on the surface of the resin film 123 bysoldering or another conductive connection device. The metal wiringterminals 127 are made of an APC alloy, Cr, Cu, or another conductivematerial. The portion of the FPC 104 in which the metal wiring terminals127 are formed is connected, with the ACF 122, to the portion of thefirst substrate 107 a in which the metal wirings 114 e and 114 f areformed. The metal wirings 114 e and 114 f on the substrate side areconnected to the metal wiring terminals 127 on the FPC side by thefunction of the conductive particles contained in the ACF 122.

[0172] Furthermore, an external connection terminal 131 is formed at theside of the FPC 104 opposite to the liquid panel side so that theexternal connection terminal 131 is connected to an external circuit notshown in the drawing. Therefore, the liquid crystal driving ICs 103 aand 103 b are driven based on the signal transmitted from the externalcircuit to supply a scanning signal to either of the first and secondelectrodes 114 a and 114 b, a data signal being supplied to the otherelectrodes. As a result, the voltage of each of the picture elementpixels arranged in the dot matrix in the effective display area V iscontrolled for each pixel, and thus the orientation of the liquidcrystal L is controlled for each picture element pixel.

[0173] In FIG. 18, the illumination device 106 functioning as theso-called back light includes a photoconductor 132 composed of anacrylic resin, a diffusion sheet 133 provided on the light emissionplane 132 b of the photoconductor 132, a reflecting sheet 134 providedon the plane of the photoconductor 132 opposite to the light emissionplane 132 b, and a LED (Light Emitting Diode) 136 serving as a lightemission source, as shown in FIG. 19.

[0174] The LED 136 is supported by an LED substrate 137 which is mountedon a supporting member (not shown in the drawing), for example, which isformed integrally with the photoconductor 132. By mounting the LEDsubstrate 137 at the predetermined position of the supporting member,the LED 136 is located at the position opposite to the light incidenceplane 132 a of the photoconductor 132, which is a side surface thereof.Reference numeral 138 denotes a buffer for buffering an impact appliedto the liquid crystal panel 102.

[0175] When the LED 136 emits light, the light is incident on the lightincidence plane 132 a, introduced into the photoconductor 132, andtransmitted therethrough while being reflected by the reflecting sheet134 and the wall surfaces of the photoconductor 132. Duringtransmittance, the light is emitted as planar light to the outside fromthe light emission plane 132 b through the diffusion sheet 133.

[0176] In the liquid crystal device 101 of this embodiment having theabove-described construction, therefore, with sufficiently brightexternal light such as sunlight, room light, or the like, the externallight is introduced into the liquid crystal panel 102 from the secondsubstrate 107 b, transmitted through the liquid crystal L, and thenreflected by the reflecting film 112 to be again supplied to the liquidcrystal L. The orientation of the liquid crystal L is controlled foreach of the picture element pixels of R, G and B by the electrodes 114 aand 114 b holding the liquid crystal L therebetween, and thus the lightsupplied to the liquid crystal L is modulated for each picture elementpixel. By modulation, light transmitted through the polarizer plate 117b and light not transmitted through the polarizer plate 117 b form animage such as a character, a numeric character, or the like on theoutside of the liquid crystal panel 102. As a result, a reflectivedisplay is performed.

[0177] On the other hand, with an insufficient quantity of externallight, light emitted from the LED 136 is emitted as planar light fromthe light emission plane 132 b of the photoconductor 132, and the lightis supplied to the liquid crystal L through the apertures 121 formed inthe reflecting film 112. Like in the reflective display, in this case,the supplied light is modulated for each picture element pixel by theliquid crystal L with the controlled orientation, thereby displaying animage on the outside. As a result, a transmissive display is performed.

[0178] The liquid crystal device 101 having the above construction ismanufactured by, for example, the manufacturing method shown in FIG. 17.In this manufacturing method, a series of steps from step P1 to step P6are steps of forming the first substrate 107 a, and a series of stepsfrom step P11 to step P14 are steps of forming the second substrate 107b. The first substrate forming process and the second substrate formingprocess are separately carried out.

[0179] First, the first substrate forming process is described. Thereflecting film 112 for a plurality of liquid crystal panels 102 isformed on the surface of a large-area mother raw material base made oflight transmitting glass, light transmitting plastic, or the like by thephotolithography method, and the insulating film 113 is formed on thereflecting film 112 by a known deposition method (Step P1). Next, thefirst electrodes 114 a and the wirings 114 c, 114 d, 114 e and 114 f areformed by the photolithography process (Step P2).

[0180] Next, the alignment film 116 a is formed on the first electrodes114 a by coating, printing, or the like (Step P3), and then thealignment film 116 a is rubbed to determine the initial orientation ofthe liquid crystal (Step P4). Next, the sealing material 108 iscircularly formed by, for example, screen printing or the like (StepP5), and then the spherical spacers 119 are dispersed on the sealingmaterial 108 (Step P6). As a result, a large-area mother first substrateis formed, in which a plurality of panel patterns are formed on thefirst substrates 107 a of the liquid crystal panels 102.

[0181] The second substrate forming process (Step P11 to Step P14 shownin FIG. 17) is carried separately from the first substrate formingprocess. First, a large-area mother raw material base made of lighttransmitting glass, light transmitting plastic, or the like is prepared,and the color filter 118 for a plurality of the liquid crystal panels102 is formed on the surface of the mother raw material base (Step P11).The color filter is formed by the production method shown in FIG. 7, inwhich the filter elements of each of the R, G and B colors are formed byusing the ink jet apparatus 16 shown in FIG. 9 according to any one ofthe methods of controlling an ink jet head shown in FIGS. 1, 2, 3, 4,and 5. The method of producing a color filter, and the method ofcontrolling an ink jet head are the same as described above, anddescription thereof is thus omitted.

[0182] As shown in FIG. 7(d), the color filter 1, i.e., the color filter118 is formed on the mother board 12, i.e., the mother raw materialbase. Then, the second electrodes 114 b are formed by thephotolithography process (Step P12), and the alignment film 116 b isformed by coating, printing, or the like (Step P13). Then, the alignmentfilm 116 b is rubbed to determine the initial orientation of the liquidcrystal (Step P14). As a result, a large-area mother second substrate isformed, in which a plurality of panel patterns are formed on the secondsubstrates 107 b of the liquid crystal panels 102.

[0183] After the large-area mother first and second substrates areformed as described above, both mother boards are aligned with eachother with the sealing material 108 provided therebetween, and thenbonded together (Step P21). As a result, an empty panel structurecontaining a panel portion for a plurality of liquid crystal panels isformed with no liquid crystal sealed therein.

[0184] Next, scribe grooves, i.e., cutting grooves, are formed atpredetermined positions of the completed empty panel structure, and thenthe panel structure is broken, i.e., cut, based on the scribe grooves(Step P22). Consequently, a strip-like empty panel structure is formed,in which a liquid crystal inlet opening 110 (refer to FIG. 18) of thesealing material 108 of each of the liquid crystal panels is exposed tothe outside.

[0185] Then, the liquid crystal L is injected into the liquid crystalpanel through the exposed liquid crystal inlet opening 110, and then theliquid crystal inlet opening 110 is sealed with a resin or the like(Step P23). The liquid crystal is generally injected by, for example, amethod in which a storage reservoir in which the liquid crystal isstored, and the strip-like empty panel are placed in a chamber, thestrip-like empty panel is dipped in the liquid crystal in the chamberafter the chamber is put into a vacuum state, and then the chamber isopened to the atmospheric pressure. At this time, the inside of theempty panel is in a vacuum state, and thus the liquid crystalpressurized by the atmospheric pressure is introduced into the panelthrough the liquid crystal inlet opening. Since the liquid crystaladheres to the surfaces of the liquid crystal panel structure afterbeing injected in the panel structure, the strip-like panel is cleanedin Step P24 after the liquid crystal is injected.

[0186] Then, after injection of the liquid crystal and cleaning, scribegrooves are again formed at predetermined positions of the strip-likemother panel, and then the strip-like panel is cut based on the scribegrooves to be cut into a plurality of liquid crystal panels 102 (StepP25). Then, as shown in FIG. 18, the liquid crystal driving ICs 103 aand 103 b are mounted on each of the thus-produced liquid crystal panels102, the illumination device 106 is mounted as a back light, and the FPC104 is connected to the panel 102 to complete the intended liquidcrystal device 101 (Step P26).

[0187] The above-described method and apparatus for manufacturing aliquid crystal device are characterized by, particularly, the step ofproducing the color filter as described below. Namely, an ink jet headhaving the structure shown in FIGS. 1, 2, 3, 4 or 5 is used fordischarging ink from the nozzle rows 28 of the plurality of heads 20during main scanning of the substrate 12 with the carriage 25 serving assupporting means for supporting the plurality of heads 20. Therefore,the scanning time can be shortened as compared with the case of scanningof the surface of the substrate 12 with one head, thereby shortening thetime required for producing a color filter.

[0188] Since main scanning is performed with the heads 20 each of whichis inclined at an angle θ with the sub-scanning direction Y, the nozzlepitch of the plurality of nozzles 27 belonging to each of the heads 20can be coincided with the distance between the filter element formationareas 7, i.e., the element pitch, on the substrate 12. When the nozzlepitch can be geometrically coincided with the element pitch, thepositions of the nozzle rows 28 desirably need not be controlled in thesub-scanning direction Y

[0189] Also, the entire carriage 25 is not inclined, but each of theheads 20 is inclined, the distance T between the nozzle closest to thesubstrate 12 and the nozzle 27 far from the substrate 12 is shorter thanthe case in which the entire carriage 25 is inclined, thereby shorteningthe scanning time of the substrate 12 with the ink jet head 22.Therefore, the time required for producing a color filter can beshortened.

[0190] In the method and apparatus for manufacturing a liquid crystaldevice of this embodiment, the filter elements 3 are formed by inkdischarge from the ink jet head 22, thereby causing no need to passthrough such a complicated process as the use of the photolithographyprocess and no waste of materials.

[0191]FIG. 20 shows a manufacturing method using an apparatus formanufacturing an EL device according to an embodiment of the presentinvention. FIG. 21 shows the main steps of the manufacturing method anda main sectional structure of a finally resulted EL device. As shown inFIG. 21(d), an EL device 201 can include pixel electrodes 202 formed ona transparent substrate 204, a bank 205 formed in a lattice shape asviewed from the direction of arrow G to be located between therespective pixel electrodes 202, a hole injection layer 220 formed inthe lattice-shaped recesses, a R color luminescent layer 203R, a G colorluminescent layer 203G and a B color luminescent layer 203B which areformed in the lattice-shaped recesses in a predetermined arrangementsuch as a stripe arrangement as viewed from the direction of arrow G,and a counter electrode 213 formed on the luminescent layers.

[0192] When each of the pixel electrodes 202 is driven by a two-terminalactive element, such as a TFD (Thin Film Diode) element or the like, thecounter electrodes 213 are formed in stripes as viewed from thedirection of arrow G. When each of the pixel electrodes 202 is driven bya three-terminal active element such as a TFT (Thin Film Transistor)element or the like, the counter electrodes 213 are formed as a singleplanar electrode.

[0193] The area held between each of the pixel electrodes 202 and eachof the counter electrodes 213 serves as a picture element pixel, and aunit of the three picture element pixels of R, G and B colors forms apixel. By controlling a current flowing through each of the pictureelement pixels, a desired pixel of the plurality of picture elementpixels is selectively illuminated to display a desired full-color imagein the direction of arrow H.

[0194] The EL device 201 is manufactured by, for example, themanufacturing method shown in FIG. 20.

[0195] Namely, in Step P51, as shown in FIG. 21(a), active elements suchas TFD element, TFT elements, or the like are formed on the surface ofthe transparent substrate 204, and the pixel electrodes 202 are furtherformed. As the forming method, for example, a photolithography method, avacuum deposition method, a sputtering method, a pyrosol method, or thelike can be used. As the material of the pixel electrodes, ITO (IndiumTin Oxide), tin oxide, a compound oxide of indium oxide and zinc oxide,or the like can be used.

[0196] Next, in Step P52, as shown in FIG. 20(a), a partition, i.e., thebank 205, is formed by a puttering method, for example, aphotolithography method, to fill the spaces between the respectivetransparent electrodes 202. This can improve contrast, and prevent colormixing of luminescent materials and light leakage from the spacesbetween the pixels. Although the material of the bank 205 is not limitedas long as it has durability against a solvent of the EL materials, anorganic material which can be fluorinated by fluorocarbon gas plasmatreatment, for example, an acrylic resin, an epoxy resin, photosensitivepolyimide, or the like is preferably used.

[0197] Next, the substrate 204 is continuously treated with oxygen gasplasma and fluorocarbon gas plasma immediately before ink for the holeinjection layer is coated (Step P53). This treatment can make apolyimide surface water-repellant and an ITO surface hydrophilic,thereby controlling wettability of the substrate for finely patterningink jet droplets. As the device for generating a plasma, either a devicefor generating a plasma in vacuum or a device for generating a plasma inthe air may be used in a same manner.

[0198] Next, in Step P54, as shown in FIG. 21(a), the ink for the holeinjection layer is discharged from the ink jet head 22 of the ink jetapparatus 16 shown in FIG. 9, and coated in a pattern on the pixelelectrodes 202. Specifically, the ink jet head controlling method usesthe method shown in FIG. 1, 2, 3,4 or 5. After coating, the solvent isremoved under a vacuum (1 torr) at room temperature for 20 minutes (StepP55), and then heat treatment is performed in the air at 20° C. (on ahot plate) for 10 minutes to form the hole injection layers 220incompatible with ink for luminescent layers (Step P56). The thicknessof the hole injection layers 220 is 40 nm.

[0199] Next, in Step P57, as shown in FIG. 21(b), ink for the R colorluminescent layer and ink for the G color luminescent layer are coatedon the hole injection layer in each of the filter element areas by usingan ink jet process. In this process, the ink for each luminescent layeris discharged from the ink jet head 22 of the ink jet apparatus 16 shownin FIG. 9, and the ink jet controlling method is performed according tothe method shown in FIG. 1, 2, 3, 4 or 5. The ink jet process can easilyfinely pattern ink within a short time. The thickness can be changed bychanging the solid content of an ink composition and the dischargeamount.

[0200] After coating of the inks for luminescent layers, the solvent isremoved under a vacuum (1 torr) at room temperature for 20 minutes (StepP58), and then the inks are conjugated by heat treatment in a nitrogenatmosphere at 150° C. for 4 hours to form the R color luminescent layer203R and the G color luminescent layer 203G (Step P59). The thickness ofthe luminescent layers is 50 nm. The luminescent layers conjugated byheat treatment are insoluble in a solvent.

[0201] The hole injection layer 220 may be continuously treated withoxygen gas plasma, and fluorocarbon gas plasma before the luminescentlayers are formed. This can form a fluorinated layer on the holeinjection layer 220 to increase the efficiency of hole injection due toan increase in ionization potential, thereby providing an organic ELdevice having a high efficiency of light emission.

[0202] Next, in Step P60, as shown in FIG. 21(c), the B colorluminescent layer 203B is formed on the R color luminescent layer 203R,the G color luminescent layer 203G and the hole injection layer 220 ineach of the picture element pixels. This can not only form the primarycolors R, G and B, but also remove the steps between the R colorluminescent layers 203R and the G color luminescent layers 203G, and thebank 205 to planarize the surface. Therefore, short-circuiting betweenthe upper and lower electrodes can be securely prevented. By controllingthe thickness of the B color luminescent layers 203B, the B colorluminescent layers 203B function as electron injection transport layersin a laminated structure comprising the R color luminescent layers 203Rand the G color luminescent layers 203G, thereby emitting no B colorlight.

[0203] As the method of forming the B color luminescent layers 203B asdescribed above, for example, a general spin coating method as a wetmethod, or the same ink jet method as that for forming the R colorluminescent layers 203R and the G color luminescent layers 203G can beused.

[0204] Then, in Step P61, as shown in FIG. 21(d), the counter electrodes213 are formed to produce the intended EL device 201. When the counterelectrodes 213 are formed as a planar electrode, the electrodes can beformed by a deposition method such as evaporation, sputtering, or thelike using, for example, Mg, Ag, Al, Li, or the like as a material. Whenthe counter electrodes 213 are formed as stripe electrodes, theelectrodes can be formed by patterning a deposited electrode layer byphotolithography or the like.

[0205] In the above-described method and apparatus for manufacturing anEL device, an ink jet head having the structure shown in FIGS. 1, 2, 3,4 or 5 is used for discharging ink from the nozzle rows 28 of theplurality of heads 20 during main scanning of the substrate 12 with thecarriage 25 serving as supporting device that supports the plurality ofheads 20. Therefore, the scanning time can be shortened as compared withthe case of scanning of the surface of the substrate 12 with one head,thereby shortening the time required for producing an EL device.

[0206] Since main scanning is performed with the heads 20 each of whichis inclined at an angle θ with the sub-scanning direction Y, the nozzlepitch of the plurality of nozzles 27 belonging to each of the heads 20can be coincided with the distance between the EL picture element pixelformation areas 7, i.e., the element pitch, on the substrate 12. Whenthe nozzle pitch can be geometrically coincided with the element pitch,the positions of the nozzle rows 28 desirably need not be controlled inthe sub-scanning direction Y.

[0207] Also, the entire carriage 25 is not inclined, but each of theheads 20 is inclined, the distance T between the nozzle 27 closest tothe substrate 12 and the nozzle 27 far from the substrate 12 is shorterthan the case in which the entire carriage 25 is inclined, therebyshortening the scanning time of the substrate 12 with the ink jet head22. Therefore, the time required for producing a EL device can beshortened. In the manufacturing method and apparatus of this embodiment,the picture element pixels 3 are formed by ink discharge from the inkjet head 22, thereby causing no need to pass through such a complicatedprocess as the use of the photolithography process and no waste ofmaterials.

[0208] Although the present invention is described above with referenceto the preferred embodiments, it should be understood that the presentinvention is not limited to the embodiments, and various modificationscan be made without departing from the spirit and scope of the presentinvention.

[0209] For example, in the above-described embodiments, six heads 20 areprovided in the ink jet head 22 as shown in FIG. 1, the number of theheads 20 can be decreased or increased.

[0210] In the embodiment shown in FIG. 1, plural lines of the colorfilter formation areas 11 are set on the mother board 12, however, thepresent invention can be applied to the case in which one line of thecolor filter formation areas 11 is formed on the mother board 12. Also,the present invention can be applied to the case in which only one colorfilter formation area 11, whose size is substantially the same as orextremely smaller than the mother board 12, is set on the mother board12.

[0211] In the apparatus producing a color filter shown in FIGS. 9 and10, the ink jet head 22 is moved in the X direction to perform mainscanning of the substrate 12, and the substrate 12 is moved in the Ydirection by the sub-scanning driving device 21 to perform sub-scanningof the substrate 12 with the ink jet head 22. However, in contrast, thesubstrate 12 may be moved in the Y direction to execute main scanning,and the ink jet head 22 may be moved in the X direction to executesub-scanning.

[0212] Although each of the above-described embodiments uses an ink jethead having a structure in which ink is discharged by utilizingdeflection of a piezoelectric element, an ink jet head having anydesired structure can be used.

[0213] Although each of the above-described embodiments has a generalconstruction in which the main scanning direction is perpendicular tothe sub-scanning direction as an example, the relation between the mainscanning direction and the sub-scanning direction is not limited to theperpendicular relation, and both directions may cross each other at anydesired angle.

[0214] As the material to be discharged, various materials can beselected according to the elements formed on an object such as asubstrate or the like. Besides the above-described ink and ELluminescent materials, for example, a silica glass precursor, aconductive material such as a metal compound, a dielectric material, ora semiconductor material may be used.

[0215] Although the above embodiments relate to the method and apparatusfor producing a color filter, the method and apparatus for manufacturinga liquid crystal device, and the method and apparatus for manufacturingan EL device as examples, it should be understood that the presentinvention is not limited to these examples, and can be used for allindustrial techniques for finely patterning an object.

[0216] Examples of applications can include the formation of varioussemiconductor devices (thin film transistors, thin film diodes, etc.),various wiring patterns, and insulating films, etc.

[0217] As the material to be discharged from a head, various materialscan be selected according to the elements formed on an object such as asubstrate or the like. Besides the above-described ink and ELluminescent materials, for example, a silica glass precursor, aconductive material such as a metal compound, a dielectric material, ora semiconductor material may be used.

[0218] Although, in the above-described embodiments, the head isreferred to as an “ink jet head” for the sake of convenience, thematerial to be discharged from the ink jet head is not limited to ink.Examples of the material to be discharged include the EL luminescentmaterials, a silica glass precursor, a conductive material such as ametal compound, a dielectric material, a semiconductor material, and thelike. The liquid crystal device and EL device manufactured by themanufacturing method and apparatuses of the above embodiments can bemounted on the display sections of electronic devices, for example, acellular phone, a portable computer, etc.

[0219] In a color filter, a liquid crystal device, an EL device andapparatuses and methods for producing these devices of the presentinvention, ink is discharged from a plurality of heads during mainscanning of a substrate with the plurality of heads. Therefore, thescanning time can be shortened as compared with the case of scanning ofthe surface of the substrate with one head.

[0220] Since main scanning is performed with the heads each of which isinclined, the nozzle pitch of the plurality of nozzles belonging to eachof the heads can be coincided with the element pitch of filter elementsor picture element pixels formed on the substrate.

[0221] Furthermore, since not the entire supporting mechanism forsupporting the plurality of heads is inclined, but each of the heads isinclined, the distance between the nozzle closest to the substrate andthe nozzle far from the substrate is shorter than the case in which theentire supporting device is inclined, thereby shortening the scanningtime of the substrate with the supporting mechanism. Therefore, the timerequired for producing a color filter, a liquid crystal device, or a ELdevice can be shortened.

[0222] While this invention has been described in conjunction with thespecific embodiments thereof, it is evident that many alternatives,modifications and variations will be apparent to those skilled in theart. Accordingly, preferred embodiments of the invention as set forthherein are intended to be illustrative, not limiting. There are changesthat may be made without departing from the spirit and scope of theinvention.

What is claimed is:
 1. An apparatus for discharging a material to anobject, comprising: a plurality of heads each having a nozzle row, thenozzle row having an arrangement of a plurality of nozzles; a supportingmechanism that supports the plurality of heads; and a mechanism thatscans at least one of the object and the supporting mechanism relativeto each other in a scanning direction, wherein the nozzle row isinclined relative to the scanning direction.
 2. An apparatus fordischarging a material according to claim 1, the plurality of the headsbeing supported obliquely relative to a longitudinal direction of thesupporting mechanism.
 3. An apparatus for discharging a materialaccording to claim 1, at least one of the object and the supportingmechanism being scanned relative to the other in at least one of a mainscanning direction and a sub-scanning direction crossing the mainscanning direction.
 4. An apparatus for discharging a material accordingto claim 1, the plurality of the heads having substantially a samenozzle pitch of the nozzle rows, and substantially a same inclinationangle of the nozzle rows.
 5. An apparatus for discharging a material toan object, comprising: a plurality of heads each having a nozzle row,the nozzle row having an arrangement of a plurality of nozzles; asupporting mechanism that supports the plurality of the heads; amechanism that scans at least one of the object and the supportingmechanism relative to each other; and a mechanism that controls an angleformed by at least one of the nozzle rows and the scanning direction. 6.An apparatus for discharging a material according to claim 5, furthercomprising: a mechanism for controlling a spacing between the pluralityof the nozzle rows.
 7. An apparatus for discharging a material accordingto claim 5, the mechanism that controls the angle between at least onenozzle row and the scanning direction controlling the angle in such amanner that the plurality of the heads have substantially the samenozzle pitch of the nozzle rows and substantially the same inclinationangle of the nozzle rows.
 8. A method of discharging a material to anobject, comprising: scanning at least one of a plurality of heads and asupporting mechanism that supports the plurality of the heads relativeto each other, the heads each having a nozzle row including anarrangement of a plurality of nozzles; and discharging the material tothe object, wherein at least one of the nozzle rows is inclined relativeto the scanning direction.
 9. A method for discharging a materialaccording to claim 8, one of the object and the supporting mechanismbeing scanned relative to the other in at least one of a main scanningdirection and a sub-scanning direction crossing the main scanningdirection.
 10. A method for discharging a material according to claim 8,the plurality of the heads having substantially the same nozzle pitchand substantially the same inclination angle of the nozzle rows.
 11. Amethod for discharging a material according to claim 8, furthercomprising: controlling the angle formed by at least one of the nozzlerows and a scanning direction.
 12. A method for discharging a materialaccording to claim 8, further comprising: controlling a spacing betweenthe plurality of the nozzle rows.
 13. An apparatus for producing a colorfilter comprising a discharging apparatus according to claim 1, a colorfilter material being the material that is discharged to a substrateserving as the object.
 14. An apparatus for manufacturing an EL devicecomprising a discharging apparatus according to claim 1, an ELluminescent material being the material that is discharged to asubstrate serving as the object.
 15. An electronic apparatus comprisinga component manufactured by a manufacturing method comprising a methodof discharging a material according to claim
 10. 16. An apparatus forproducing a color filter, comprising: a plurality of heads each having anozzle row, the nozzle row including an arrangement of a plurality ofnozzles; a mechanism that supplies a filter material to the heads; and asupporting mechanism that supports the plurality of the heads, whereinthe supporting mechanism supports the plurality of the heads in aninclined state.
 17. An apparatus for producing a color filter accordingto claim 16, the supporting mechanism supporting the heads in a fixedstate.
 18. An apparatus for producing a color filter according to claim16, the plurality of the heads having substantially a same nozzle pitchof the nozzle rows, and substantially a same inclination angle of thenozzle rows.
 19. An apparatus for producing a color filter, comprising:a plurality of heads each having a nozzle row, the nozzle row includingan arrangement of a plurality of nozzles; a mechanism that supplies afilter material to the heads; a supporting mechanism that supports theplurality of the heads; a main scanning mechanism that moves thesupporting mechanism by main scanning; a sub-scanning mechanism thatmoves the supporting mechanism by sub-scanning; a nozzle row anglecontrol mechanism that controls the inclination angles of the pluralityof the nozzle rows; and a nozzle row spacing control mechanism thatcontrols a spacing between the plurality of the nozzle rows.
 20. Anapparatus for producing a color filter according to claim 19, theplurality of the heads having substantially a same nozzle pitch andsubstantially a same inclination angle of the nozzle rows.
 21. A methodof producing a color filter, comprising: moving, in a main scanningdirection, a head having a nozzle row comprising an arrangement of aplurality of nozzles while discharging a filter material from theplurality of nozzles to form a filter element on a substrate, wherein aplurality of the heads are provided to be arranged in an inclined state.22. A method for producing a color filter according to claim 21, theplurality of the heads have substantially a same nozzle pitch of thenozzle rows, and substantially a same inclination angle of the nozzlerows.
 23. An apparatus for manufacturing a liquid crystal device,comprising: a plurality of heads each having a nozzle row, the nozzlerow including an arrangement of a plurality of nozzles; a mechanism thatsupplies a filter material to the heads; a supporting mechanism thatsupports the plurality of the heads; a main scanning mechanism thatmoves the supporting mechanism by main scanning; and a sub-scanningmechanism that moves the supporting mechanism by sub-scanning, whereinthe supporting mechanism supports the plurality of the heads in aninclined state.
 24. A method of manufacturing a liquid crystal device,comprising: moving, in a main scanning direction, a head having a nozzlerow having an arrangement of a plurality of nozzles while discharging afilter material from the plurality of nozzles to form a filter elementon a substrate, wherein a plurality of the heads are provided to bearranged in an inclined state.
 25. An apparatus for manufacturing an ELdevice, comprising: a plurality of heads each having a nozzle row, thenozzle row having an arrangement of a plurality of nozzles; a mechanismthat supplies an EL luminescent material to the heads; a supportingmechanism that supports the plurality of the heads; a main scanningmechanism that moves the supporting mechanism by main scanning; asub-scanning mechanism that moves the supporting mechanism bysub-scanning; a nozzle row angle control mechanism that controls theinclination angles of the plurality of the nozzle rows; and a nozzle rowdistance control mechanism that controls a spacing between the pluralityof the nozzle rows.
 26. A method of manufacturing an EL device,comprising: moving, in a main scanning direction, a head having a nozzlerow including an arrangement of a plurality of nozzles while dischargingan EL luminescent material from the plurality of nozzles to form an ELluminescent layer on a substrate, wherein a plurality of the heads areprovided to be arranged in an inclined state.